Micro-Patterned Sapphire Substrate,MPSS

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The periodic sapphire micro-structure is fabricated by etching technology, carriers for gallium nitride glowing and world wide material for high brightness light emitting diode.

Advantages of micro patterned sapphire substrate (MPSS):

  • • Enhance the light extraction of LED.
  • • Improve the electrical performance of LED.

Advantages of imprinting lithography than typical lithography:

  • • Large allowable tolerance for BOW, WRAP, TTV and LTV of substrate.
Orientation Surface Orientation : C-plain (0001)
Orientation Flat : A-plane (11-20)
Wafer Size

Diameter : 50.8 +/- 0.2 mm
Thickness : 430 +/- 25 mm

Front Surface(Pattern Size) Pitch: 3000nm
Height: 1700nm
Bottom Diameter: 2800nm
Arrangement : Trigonal
Back Surface

Finishing : Fine Ground